Hostname: page-component-78c5997874-94fs2 Total loading time: 0 Render date: 2024-11-06T06:58:15.727Z Has data issue: false hasContentIssue false

Damage to Crystalline Silicon Following Implantation by Low Energy Silicon Ions

Published online by Cambridge University Press:  26 February 2011

Y. Levine
Affiliation:
Boston University, Electrical, Computer and Systems Engineering Department, Boston, MA 02215
N. Herbots
Affiliation:
Arizona State University, Department of Physics and Astronomy, Tempe, AZ 85287
S. Dunham
Affiliation:
Boston University, Electrical, Computer and Systems Engineering Department, Boston, MA 02215
Get access

Abstract

A new approach to investigate low energy defect formation and annealing in a crystal is developed, based on experimental observations of the total number of interstitials. The model is applied to damage in crystalline silicon caused by low energy implantation of Si-atoms during 40eV implants at 300°Kand 685°K. The model has two versions, analytical and computational, and includes two kinds of diffusing species, self-interstitials and vacancies, their interaction, surface motion of the growing crystal, and a constant source of defects. The source was calculated using a modified TRIM code (TRJMCSR). The focal point of the analysis is the number of interstitials per ion dose surviving at the end of the deposition time (damage to dose ratio or DDR, which is found to be an informative quantity and can be calculated for more sophisticated models including precipitation.

Type
Research Article
Copyright
Copyright © Materials Research Society 1992

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Herbots, N., Appleton, B. R., Noggle, T. S., Zuhr, R. A., Pennycook, S. J., Nucl. Instr. and Meth. B13, 250 (1986).Google Scholar
[2] Biersack, J. P., Ecstein, W., Appl. Phys. A34, 73 (1984);CrossRefGoogle Scholar
Vancauwenberghe, O., Herbots, N. and Hellman, O., Journal of Vac. Sc. Tech. B (9), 2027 (1991).Google Scholar
[3] Volkov, E. A., Chislennye methody (Numerical methods), (Nauka, Moscow, 1987).Google Scholar
[4] Samarsky, A. A., Vvedenie v chislennye methody (Introduction to numerical methods), (Nauka, Moscow, 1987).Google Scholar
[5] Smirnov, V. I., Kurs vysshey matematiki (Course of High Mathematics), (Nauka, Moscow, 1974), Page 642.Google Scholar
[6] Tan, T. Y., Goselle, U., J. Appl. Phys. A37, 1 (1985).Google Scholar
[7] The Connection Machine System, (Thinking Machines Corporation, Cambridge, MA, 1991).Google Scholar
[8] Waite, T. R., Phys. Rev. 107, 463 (1957).Google Scholar
[9] Herbots, N., Helman, O. C., Cullen, P. A., and Vancauwenberghe, O., Deposition Growth: Limits for Microelectronics, Ed. Rubloff, G. W., AIP 167, 259 (1988).Google Scholar