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Crystallization of Hydrogenated Amorphous Silicon Thick Films on Molybdenum Substrates

Published online by Cambridge University Press:  15 February 2011

Nagarajan Sridhar ,
D. D. L. Chung  and
W. A. Anderson
Nagarajan Sridhar
Affiliation:
Center for Electronic and Electro-Optic Materials, State University of New York at Buffalo, NY 14260–4400, and J. Coleman, Plasma Physics Corp., P. O. Box 548, Locust Valley, NY 11650.
D. D. L. Chung
Affiliation:
Also with Department of Mechanical and Aerospace Engineering
W. A. Anderson
Affiliation:
Also with Department of Electrical and Computer Engineering
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Abstract

Crystallization of hydrogenated amorphous silicon thick films deposited by dc glow discharge on molybdenum substrates was studied by Raman scattering and x-ray diffraction. Investigation was made as a function of amorphous silicon film deposition temperature. On heating the films at a rate of 5 °C/min to 650 °C for various times, it was observed that the film deposited at 300 °C started crystallization faster than the film deposited at 150 °C. The degree of cirystallinity increased with increasing annealing time for all the films. However, at all annealing times, the degree of crystallinity for the annealed film deposited at 150 °C was higher than that of the annealed film deposited at 300 °C, indicating that the crystallization growth rate was higher for the film deposited at a lower temperature. These results were consistent with the dark conductivity measurements. The film deposited at 150 °C showed a photoresponse which increased with increasing annealing time whereas no photoresponse was observed for the film deposited at 300 °C. This was probably due to the degree of crystallinity and grain size being much larger for the film deposited at 150 °C than the film deposited at 300 °C.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 343: Symposium H – Polycrystalline Thin Films - Structure, Texture, Properties and Applications , 1994 , 697
Copyright
Copyright © Materials Research Society 1994

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References

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