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Crystallization of BaTiO3 Thin Films Prepared by Metalorganic Decomposition with Hydrothermal Treatment at 140°C

Published online by Cambridge University Press:  17 March 2011

Zhiqiang Wei ,
Minoru Noda  and
Masanori Okuyama
Zhiqiang Wei
Affiliation:
Graduate School of Engineering Science, Osaka University, Osaka, Japan
Minoru Noda
Affiliation:
Graduate School of Engineering Science, Osaka University, Osaka, Japan
Masanori Okuyama
Affiliation:
Graduate School of Engineering Science, Osaka University, Osaka, Japan
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Abstract

BaTiO3 (BTO) thin films with perovskite structure have been prepared on Pt/Ti/SiO2/Si substrates using a combined process of a conventional MOD (metal organic decomposition) process and a hydrothermal treatment. The BTO thin films with polycrystalline structure are grown on Pt/Ti/SiO2/Si substrates at a processing temperature of 140°C. The structural development, stoichiometry, spectroscopic, and dielectric properties of the BTO thin films have been systematically investigated. X-ray diffraction patterns show that well-developed crystallites with a pure perovskite phase have been formed. ICP (Inductively coupled plasma) and XPS (x-ray photoelectron spectroscopy) results show that stoichiometric BTO thin films were obtained.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 688: Symposium C – Ferroelectric Thin Films X , 2001 , C7.26.1
Copyright
Copyright © Materials Research Society 2002

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