Hostname: page-component-586b7cd67f-gb8f7 Total loading time: 0 Render date: 2024-11-23T14:52:02.422Z Has data issue: false hasContentIssue false
  • English
  • Français

Crystallization Characteristics Of Phase Change Nanoparticle Arrays Fabricated By Self-Assembly Based Lithography

Published online by Cambridge University Press:  01 February 2011

Yuan Zhang ,
Simone Raoux ,
Daniel Krebs ,
Leslie E. Krupp ,
Teya Topuria ,
Jean Jordan-Sweet ,
Marissa Caldwell ,
Philip Rice ,
Delia J. Milliron  and
H.-S. Philip Wong
Yuan Zhang
Affiliation:
[email protected], Stanford University, Electrical Engineering, 31 Angell Court, Apt. 106, Stanford, CA, 94305, United States
Simone Raoux
Affiliation:
[email protected], IBM Almaden Research Center, San Jose, CA, 95120, United States
Daniel Krebs
Affiliation:
[email protected], IBM Almaden Research Center, San Jose, CA, 95120, United States
Leslie E. Krupp
Affiliation:
[email protected], IBM Almaden Research Center, San Jose, CA, 95120, United States
Teya Topuria
Affiliation:
[email protected], IBM Almaden Research Center, San Jose, CA, 95120, United States
Jean Jordan-Sweet
Affiliation:
[email protected], IBM T. J. Watson Research Center, Yorktown Heights, NY, 10598, United States
Marissa Caldwell
Affiliation:
[email protected], Stanford University, Chemistry, Stanford, CA, 94305, United States
Philip Rice
Affiliation:
[email protected], IBM Almaden Research Center, San Jose, CA, 95120, United States
Delia J. Milliron
Affiliation:
[email protected], IBM Almaden Research Center, San Jose, CA, 95120, United States
H.-S. Philip Wong
Affiliation:
[email protected], Stanford University, Electrical Engineering, Center for Integrated Systems, 420 Via Palou, Stanford, CA, 94305, United States
Get access

Abstract

Phase change nanodot arrays were fabricated using self-assembly diblock copolymer template PS-b-PMMA (polystyrene-poly (methyl-methacrylate)) and studied by time resolved X-ray diffraction. The size of the nanodots was less than 15nm in diameter with 40nm spacing. This method is quite flexible regarding the patterned materials, and can be used on different substrates. The crystallization behavior of small scale phase change nanodot arrays was studied for different materials, such as Ge15Sb85, Ge2Sb2Te5 and Ag and In doped Sb2Te. It was found that the nanodots had higher crystallization temperatures compared to their corresponding blanket films and crystallized over a broader temperature range.

Keywords

self-assemblynanostructurex-ray diffraction (XRD)
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1072: Symposium G – Phase-Change Materials for Reconfigurable Electronics and Memory Applications , 2008 , 1072-G08-05
Copyright
Copyright © Materials Research Society 2008

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

[1] Lai, S. IEDM Tech. Dig., 255, (2003).Google Scholar
[2] Pirovano, A. et al. , IEDM Tech. Dig., 699, (2003)Google Scholar
[3] Oh, J. H. et al. , IEDM Tech. Dig., 49, (2006)Google Scholar
[4] Raoux, S. et al. , Proc. Europ. Symp. On Phase Change and Ovonic Science, May 2006, Grenoble, France, 127. (2006)Google Scholar
[5] Raoux, S. et al. , J. Appl. Phys. 102, 94305 (2007)Google Scholar
[6] Hawker, C. J. and Russell, T. P. MRS Bulletin, 30, 952, (2005)Google Scholar
[7] Cheng, J. Y. et al. , Adv. Mater. 18, 2505 (2006)Google Scholar
[8] Zhang, Y. et al. , Appl. Phys. Lett. 91, 013104 (2007)Google Scholar
[9] Black, C. T. et al. , IEDM Tech. Dig., 439, (2006)Google Scholar
[10] Yang, K. Y. et al. , Microelectronic Engineering 84, 21, (2007)Google Scholar