Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-29T07:23:48.227Z Has data issue: false hasContentIssue false
  • English
  • Français

Creating Nanostructures with Controllable Sidewall Profiles for Mechanical Sensor Applications

Published online by Cambridge University Press:  01 February 2011

Yi Zhao  and
Xin Zhang
Yi Zhao
Affiliation:
[email protected], Boston University, Department of Manufacturing Engineering, United States
Xin Zhang
Affiliation:
[email protected], Boston University, Department of Manufacturing Engineering, 15 Saint Mary' St, Boston, MA, 02215, United States
Get access

Abstract

This paper presents a novel approach to create silicon nanostructures with controlled sidewall profiles. The nanostructures are fabricated by alternating the reactive ion etching process and the exposure process to the atmosphere with moisture. The air exposure is believed attributed to the sidewall passivation by facilitating the fast formation of a thin SiO2/SiOxFy layer. Using this approach, three types of representative nanostructures are demonstrated, namely: nanopillars with vertical sidewall, nanopillars with narrowed necks, and suspending nanocantilevers. Without requiring expensive facilities and extensive expertise, this work is expected to provide an alternative for developing nanostructures with a variety of geometric profiles for mechanical sensing applications.

Keywords

nanostructurereactive ion etchingsensor
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 900: Symposium O – Nanoparticles and Nanostructures in Sensors and Catalysis , 2005 , 0900-O12-07
Copyright
Copyright © Materials Research Society 2006

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Sun, Y. and Nelson, B.J., Biological Cell Injection Using an Autonomous Microrobotic System. Int. J. Robot. Res. 21 861–868, 2002.Google Scholar
[2] Lin, G.; Pister, K.S.J.; Roos, K.P., Surface Micromachined Polysilicon Heart Cell Force Transducer. J. Microelectromech. S. 9(1) 9–17, 2000.Google Scholar
[3] Saif, M.T., Sager, C.R., Coyer, S., Functionalized Biomicroelectromechanical Systems Sensors for Force Response Study at Local Adhesion Sites of Single Living Cells on Substrates, Ann. Biomed. Eng., 31(8):950–961, 2003.Google Scholar
[4] Gere, J.M., Mechanics of Material (Cole:Brooks), 2001.Google Scholar