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Published online by Cambridge University Press: 11 February 2011
We have investigated the correlation between microstructure, DC resistivity and magnetoresistance of SrRuO3 thin films. The films were epitaxially grown by pulsed laser deposition on (001) SrTiO3 substrates in a temperature range of 690–810°C. According to x-ray measurements, the structure of all films is a mixture of highly oriented domains of strained orthorhombic phases (ortho-I and ortho-II) with different lattice parameters. Films deposited at 780°C show a minimum resistivity (270 μΩcm at 300 K) and a maximum magnetoresistance (8% at 5 K). These films consist mainly of ortho-I phase (a=0.393 nm). Films deposited at 690°C (predominantly ortho-II) have the highest resistivity (up to 1700 μΩcm at 300 K) and lowest magnetoresistance (3% at 5K).