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Copper Metallization of Polyimide Film by Excimer Laser Irradiation and Electrodeposition
Published online by Cambridge University Press: 21 February 2011
Abstract
Severe excimer laser irradiation is reported to impart electrical conductivity to Kapton* polymide films. We find that a proper choice of pretreatment and irradiation practice reduces the required dose markedly. Such films have sufficient conductivity to permit direct, good-quality, adherent copper electroplating.H.M.Phillips, D.L.Callahan, R.Sauerbrey, G.Szabo and Z.Bor; Appl.Phys.Lett.58, 2761 (1991).
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- Copyright © Materials Research Society 1995
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