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Published online by Cambridge University Press: 01 February 2011
AlxGa1-xN films grown by MOCVD on sapphire and SiC substrates have been investigated by spatially resolved confocal photoluminescence microscopy and cathodoluminescence spectroscopy and mapping. The sample on SiC has a rougher topography, but it is much more uniform in emission intensity and wavelength than the sample on sapphire.