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Conduction Mechanisms in Discontinuous Copper Films
Published online by Cambridge University Press: 28 February 2011
Abstract
Copper films of coverage coefficients ranging between 0.2 and 1 were evaporated onto glass substrates under vacuum conditions (p ≃ 10−8 Torr). For these films, the temperature dependences of resistance were measured in vacuo in situ. Making use of the obtained data TCR values, as a function of coverage coefficient and the activation energy for the films with different coverage coefficients were established. The resistance of films was found to change, and TCR values approaching zero for coverage coefficients between 0.63 and 0.75. This interval (∆qc) can be regarded as the percolation interval for discontinuous Cu films.
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- Copyright © Materials Research Society 1990
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