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Composition of Sputter Deposited MoS2 Films During Run-in in Vacuum

Published online by Cambridge University Press:  28 February 2011

P.D. Ehni  and
I.L. Singer
P.D. Ehni
Affiliation:
National Research Council cooperative post-doc
I.L. Singer
Affiliation:
Naval Research Laboratory, Washington, DC 20375-5000, USA
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Abstract

Wear tests were performed under ultra high vacuum conditions in a ball-onflat configuration on magnetron sputtered and triode sputtered MoS2 films on 440C steel substrates. The issue of material loss versus deformation of the film was investigated using energy dispersive x-ray microanalyses for mass loss determinations and Michelson interferometry to measure the deformation of the tracks. Significant deformation without material loss was found in the first 10 passes. Surface composition of the tracks and the transfer film on the ball was determined by Auger electron spectroscopy. The S/Mo ratio wasfound to increase and the O/Mo ratio was found to decrease with increased sliding distance.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 140: Symposium S – New Materials Approaches to Tribology: Theory and Applications , 1988 , 245
Copyright
Copyright © Materials Research Society 1989

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