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Comparison of Three Low Dielectric Constant Organic Polymers

Published online by Cambridge University Press:  15 February 2011

C. B. Case ,
C. J. Case ,
A. Kornblit ,
M. E. Mills ,
D. Castillo  and
R. Liu
C. B. Case
Affiliation:
Bell Laboratories - Lucent Technologies, Murray Hill, NJ 07974
C. J. Case
Affiliation:
Bell Laboratories - Lucent Technologies, Murray Hill, NJ 07974
A. Kornblit
Affiliation:
Bell Laboratories - Lucent Technologies, Murray Hill, NJ 07974
M. E. Mills
Affiliation:
The Dow Chemical Company, Midland, MI 48674
D. Castillo
Affiliation:
The Dow Chemical Company, Midland, MI 48674
R. Liu
Affiliation:
Bell Laboratories - Lucent Technologies, Murray Hill, NJ 07974
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Abstract

Three low dielectric constant organic polymers are being investigated for possible use in a conventional, subtractive etch, multi-level metal process with PVD Al plugs. Material properties, physical properties, planarization ability and etch chemistries are compared, as well as the possibility of using these materials in a low temperature PVD A1 plug process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 443: Symposium H – Low-Dielectric Constant Materials II , 1996 , 177
Copyright
Copyright © Materials Research Society 1997

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