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Comparative Discharge Diagnostic Study of Silane, Disilane, and Germane RF Discharges Using Optical Emission Spectroscopy and Mass Spectrometry
Published online by Cambridge University Press: 26 February 2011
Abstract
Measurements of the depletions of the feedstock gases in monosilane-germane and disilane-germane rf discharges indicate that the dissociation rates of germane and monosilane differ by a factor of 2 whereas the dissociation rates of germane and disilane differ by a factor of 0.8. As a result, larger germane concentrations are required in disilane-germane than in monosilane-germane discharges in order to achieve equal germanium content in the resulting films.
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- Copyright © Materials Research Society 1988
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