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A Combinatorial Approach to TCO Synthesis and Characterization

Published online by Cambridge University Press:  21 March 2011

John Perkins ,
Dennis Readey ,
Jeff Alleman ,
Joe del Cueto ,
Xiaonan Li ,
Tim Coutts ,
Renaud Stauber ,
Chris Duncan ,
David Young  and
Phil Parilla
...Show all authors
John Perkins
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Dennis Readey
Affiliation:
Colorado School of Mines, Golden, CO, 80401, U.S.A
Jeff Alleman
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Joe del Cueto
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Xiaonan Li
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Tim Coutts
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
Renaud Stauber
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Chris Duncan
Affiliation:
Colorado School of Mines, Golden, CO, 80401, U.S.A
David Young
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Phil Parilla
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Brian Keyes
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Lynn Gedvilas
Affiliation:
University of Colorado, Boulder, CO, 80309, U.S.A
Davor Balzar
Affiliation:
National Institute of Standards and Technology, Boulder, CO 80303, U.S.A
Qi Wang
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
David Ginley
Affiliation:
National Renewable Energy Laboratory, Golden, CO, 80401, U.S.A
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Abstract

We have developed the deposition, characterization and analysis tools necessary for a combinatorial approach to thin film metal oxides, with a special focus on transparent conducting oxides (TCOs). We are presently depositing compositionally graded libraries using mutli-target sputtering and CVD. The initial collection of characterization tools includes UV/VIS/NIR transmission/reflection, FTIR reflectance, Raman scattering, 4-point conductivity, thickness, xray diffraction and electron microprobe. In addition to allowing for a more complete empirical optimization of TCO properties, we expect to develop an improved basic understanding of TCOs, especially in the area of p-type TCOs. This paper provides an overview of our current combinatorial material science program as applied specifically to TCOs.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 666: Symposium F – Transport and Microstructural Phenomena , 2001 , F1.6
Copyright
Copyright © Materials Research Society 2001

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References

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