Hostname: page-component-78c5997874-s2hrs Total loading time: 0 Render date: 2024-11-19T22:04:20.567Z Has data issue: false hasContentIssue false
  • English
  • Français

Chemical Vapor Synthesis of Nanostructured Ceramics

Published online by Cambridge University Press:  15 February 2011

W. Chang ,
G. Skandan ,
H. Hahn ,
S. C. Danforth  and
B. Kear
W. Chang
Affiliation:
Rutgers University, Department of Materials Science, Piscataway, NJ 08854
G. Skandan
Affiliation:
Rutgers University, Department of Materials Science, Piscataway, NJ 08854
H. Hahn
Affiliation:
Technical University of Darmstadt, Department of Materials Science, Germany
S. C. Danforth
Affiliation:
Rutgers University, Department of Ceramic Engineering, Piscataway, NJ 08854
B. Kear
Affiliation:
Rutgers University, Department of Materials Science, Piscataway, NJ 08854
Get access

Abstract

A modification of the conventional inert gas condensation apparatus for making nanostructured powders, wherein as evaporative source is replaced by a chemical source, is described. The new chemical synthetic process, called chemical vapor condensation(CVC), combines rapid thermal decomposition and expansion of a precursor/carrier gas stream in a hot tubular reactor with rapid condensation of the product particle species on a cold substrate under a reduced inert gas pressure of 1-50 mbar. The process has been used to synthesize loosely agglomerated nanoparticles (6 to 10 nm) of n-SiCxNy, starting from hexamethyldisilazane (HMDS) as precursor compound. The phase, morphology, and composition of n-SiCxNy powders can be modified by heat treatment. β-SiC particles with grain size less than 10 nm form after annealing at 1300°C in flowing Ar. In a 1:1 NH3/H2 mixture n-SiCxNy powders transform into α-Si3N4 whiskers, with [100] growth direction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 351: Symposium V – Molecularly Designed Ultrafine/Nanostructured Materials , 1994 , 363
Copyright
Copyright © Materials Research Society 1994

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. Siegel, R. W., Nanostructured Materials, 3, 1(1993)Google Scholar
2. Glitter, H., Progress in Materials Science, 33 (1990)Google Scholar
3. Hahn, H., Eastern, J. A. and Siegel, R. W., Ceramic Transactions JB: Ceramic Powder Science, 1115 (1988)Google Scholar
4. Hahn, H. and Averback, R. S., J. Appl. Phys., 67, 1113(1990)Google Scholar
5. Chang, W., Skandan, G., Hahn, H., Danforth, S. C., and Kear, B., Nanostructured Materials, 4, No1(1994)Google Scholar
6. Samaguchi, A., Toda, K., and Niihara, K., J. Am. Ceram. Soc., 74 [5] 1142–44 (1991)Google Scholar
7. Chang, W., Hahn, H, and Kear, B. (to be published)Google Scholar