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Chemical Vapor Deposition of Copper Oxide Thin Films

Published online by Cambridge University Press:  15 February 2011

Yuneng Chang  and
Glenn L. Schrader
Yuneng Chang
Affiliation:
Center for Interfacial Materials and Crystallization, Department of Chemical Engineering, Iowa State University, Ames, IA 50011
Glenn L. Schrader
Affiliation:
Center for Interfacial Materials and Crystallization, Department of Chemical Engineering, Iowa State University, Ames, IA 50011
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Abstract

Copper oxide films were prepared by organometallic chemical vapor deposition of copper acetylacetonate in an oxygen-rich environment. The films were characterized by X-ray diffraction, Auger electron spectroscopy, X-ray photoelectron spectroscopy, and scanning electron microscopy. At 360 °C, Cu2O films were formed for an oxygen pressure of 150 torr and a copper acetylacetonate vapor pressure of 0.2 torr). The Cu2O film was polycrystalline, but the orientation was primarily [111]. Differential scanning calorimetry indicated that O2 assists decomposition of the organometallic precursor during pyrolysis.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 250: Symposium R – Chemical Vapor Deposition of Refractory Metals and Ceramics II , 1991 , 291
Copyright
Copyright © Materials Research Society 1992

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References

1. Sears, W. M. and Fortin, E., Thin Solid Films, 103, 303 (1983).Google Scholar
2. Nakahara, S., Thin Solid Films, 102, 345 (1983).Google Scholar
3. Potda, H. S. and Mitra, A., Solar Energy Matl., 4, 291 (1981).CrossRefGoogle Scholar
4. Beensh-Marchwicka, G. and Slaby, M., Thin Solid Films, 88, 33 (1982).CrossRefGoogle Scholar
5. Ajayi, O. B., Akanni, H. S., and Lambi, J. N., Thin Solid Films, 185, 123 (1990).CrossRefGoogle Scholar
6. Armitage, D. N., Dunhill, N. I., West, R. H., and Williams, J. O., J. Cryst. Growth, 108, 683 (1991).Google Scholar
7. Castro, V. D., Appl. Surf. Sci., 28, 270 (1987).Google Scholar
9. Jones, M. M., Inorg. Chem., 1, 166 (1962).Google Scholar