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Characterization of Tungsten Silicides Formed by Rapid Thermal Annealing.

Published online by Cambridge University Press:  26 February 2011

M. Siegal ,
J. J. Santiago  and
J. Van der Spiegel
M. Siegal
Affiliation:
Department of Materials Science and Engineering, University of Pennsylvania, Philadelphia, Pa. 19104.
J. J. Santiago
Affiliation:
Center for Sensors Technology, Department of Electrical Engineering, University of Pennsylvania, Philadelphia, Pa. 19104.
J. Van der Spiegel
Affiliation:
Center for Sensors Technology, Department of Electrical Engineering, University of Pennsylvania, Philadelphia, Pa. 19104.
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Abstract

Tungsten silicide samples were formed by sputter depositing 80 nm W metal onto (100) oriented, 5 ohm-cm Si wafers. After deposition, the samples were fast radiatively processed in an RTA system using quartz-halogen tungsten lamps as radiation sources for time intervals ranging from 20 to 60s under high vacuum. Films processed at 22–25 W/cm2 radiation with the film side of the samples oriented away from the lamps result in films which are metallic or cloudy in color, and have mixed composition as evidenced by x-ray diffraction (W, W5 Si3 and WSi2). Films processed with the film side oriented toward the lamps show the occurrence of a phase transforF.ation clearly nucleated at the film edge. The new phase is grey and mostly composed of WSi2, with film resistivities 55–60 μΩ-cm. AES measurements show a uniformly distributed Si diffusion profile into the metal film, while SEM indicates a nucleation and growth of the phase once diffusion occurs.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 52: Symposium B – Rapid Thermal Processing , 1985 , 289
Copyright
Copyright © Materials Research Society 1986

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References

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