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The Characterization of TiNi Shape-Memory Actuated Microvalves

Published online by Cambridge University Press:  17 March 2011

B.-K. Lai ,
G. Hahm ,
L. You ,
C.-L. Shih ,
H. Kahn ,
S. M. Phillips  and
A. H. Heuer
B.-K. Lai
Affiliation:
Dept of Materials Science and Engineering, Reserve University Cleveland, OH 44106-7204
G. Hahm
Affiliation:
Dept of Electrical Engineering and Computer Science CaseWestern Reserve University Cleveland, OH 44106-7204
L. You
Affiliation:
Dept of Electrical Engineering and Computer Science CaseWestern Reserve University Cleveland, OH 44106-7204
C.-L. Shih
Affiliation:
Dept of Materials Science and Engineering, Reserve University Cleveland, OH 44106-7204
H. Kahn
Affiliation:
Dept of Materials Science and Engineering, Reserve University Cleveland, OH 44106-7204
S. M. Phillips
Affiliation:
Dept of Electrical Engineering and Computer Science CaseWestern Reserve University Cleveland, OH 44106-7204
A. H. Heuer
Affiliation:
Dept of Materials Science and Engineering, Reserve University Cleveland, OH 44106-7204
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Abstract

Co-sputtering has been used to fabricate equiatomic thin films of TiNi, a shape memory alloy, which form the basis of microactuators with many applications in MEMS. The stress evolution of TiNi films will be described. The performance of the TiNi actuators has been characterized, with regards to actuation force, recoverable strain, time response, and fatigue resistance. The performance of microvalves using these actuators will also be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 657: Symposia EE – Materials Science of Microelectromechanical Systems (MEMS) Devices III , 2000 , EE8.3
Copyright
Copyright © Materials Research Society 2001

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References

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