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Characterization of Mechanical Properties of Thin Polymer Films using Scanning Probe Microscopy

Published online by Cambridge University Press:  10 February 2011

J. Xu ,
J. Hooker ,
I. Adhihmetty ,
P. Padmanabhan  and
W. Chen
J. Xu
Affiliation:
M254, [email protected], (602)655-4813
J. Hooker
Affiliation:
Motorola Inc., 2200 W. Broadway Rd., Mesa, AZ 85202
I. Adhihmetty
Affiliation:
Motorola Inc., 2200 W. Broadway Rd., Mesa, AZ 85202
P. Padmanabhan
Affiliation:
Motorola Inc., 2200 W. Broadway Rd., Mesa, AZ 85202
W. Chen
Affiliation:
Motorola Inc., 2200 W. Broadway Rd., Mesa, AZ 85202
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Abstract

The extremely high measurement sensitivity and accuracy has made scanning probe microscopy (SPM) a valuable tool for detecting various kinds of tip surface interactions such as Van der Waals force for AFM, electron tunneling for STM, electric / magnetic forces for EFM/MFM, frictional force for LFM, etc. This paper presents a new technique, SPM nanoindentation technique, for monitoring the repulsive force between the sharp probe and material surface as a means to detect the mechanical properties of materials. The key advantages of SPM nano-indentation are its imaging capability which allows accurate measurement of indentation geometry and precise location of indentation probe for micro-mechanical measurement. This particular study explores the areas of applicability of SPM for measuring mechanical properties such as Young's modulus of materials. Limit studies have been done in understanding the reproducibility of force curves, the effect of surface roughness on force curve, substrate on Young's modulus measurement, etc.. Examples of Young's modulus extraction for organic films will be presented.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 522: Symposium T – Fundamentals of Nanoindentation & Nanotribology , 1998 , 217
Copyright
Copyright © Materials Research Society 1998

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