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Characterization of Hole Traps Generated by Electron Injection in Thin SiO2 Films

Published online by Cambridge University Press:  10 February 2011

Tomasz Brożek ,
Eric B. Lum  and
Chand R. Viswanathan
Tomasz Brożek
Affiliation:
Electrical Engineering Department, University of California, Los Angeles, CA 90095 Semiconductor Technologies Laboratory, SPS, Motorola, Inc., MD: K21, Austin, TX 78721
Eric B. Lum
Affiliation:
Electrical Engineering Department, University of California, Los Angeles, CA 90095
Chand R. Viswanathan
Affiliation:
Electrical Engineering Department, University of California, Los Angeles, CA 90095
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Abstract

MOS device stability can be significantly affected by charge trapping in the gate oxide, which changes device parameters and causes serious reliability problems in transistors and memory cells. Hole traps, generated by high-field electron injection, are studied in this work in devices with thermal oxides less than 10 nm thick. PMOS transistors, after various doses of positive and negative Fowler-Nordheim injection and post-stress annealing, are subjected to substrate hot hole injection to investigate hole trapping kinetics. Parameters of hole traps, generated under the stress, are studied as a function of gate oxide thickness and electron injection dose.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 473: Symposium J – Materials Reliability in Microelectronics VII , 1997 , 203
Copyright
Copyright © Materials Research Society 1997

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References

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