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Carbon Nanotubes and Nanofibers Grown by Microwave Plasma Enhanced Chemical Vapor Deposition on a Nickel Substrate
Published online by Cambridge University Press: 01 February 2011
Abstract
Both carbon nanotubes and carbon nanofibers were grown on a thick nickel substrate by means of microwave plasma enhanced chemical vapor deposition (MPECVD) process using 20% CH4 and 80% H2 at a temperature of 750°C and a pressure of 50 Torr. The substrate was pre-abraded with 1.0μm diamond powder and 15.0 μm diamond paste to increase the rate of nucleation. When the substrate is taken out of the reactor the film detaches itself completely from the nickel. Unusual outgrowth structures appear jutted on one section of the substrate in a symmetrical manner. These structures were very hard and, when analyzed using environmental scanning electron microscope (ESEM), Raman microscopy and transmission electron microscope (TEM), micro-trees and an abundance of multi wall carbon nanotubes (MWCNTs) and nanofibers were observed. An attempt to measure the hardness of the film using a nano-indenter was inconclusive due to the extreme hardness of the material produced.
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- Copyright © Materials Research Society 2004