Hostname: page-component-586b7cd67f-g8jcs Total loading time: 0 Render date: 2024-11-29T07:33:16.811Z Has data issue: false hasContentIssue false
  • English
  • Français

Bond Graphs For Cvd Processes

Published online by Cambridge University Press:  21 February 2011

Surya R. Kalidindi  and
Seshu B. Desu
Surya R. Kalidindi
Affiliation:
Department of Mechanical Engineering, MIT, Cambridge, MA 02139.
Seshu B. Desu
Affiliation:
Department of Materials Engineering, VPI & SU, Blacksburg, VA 24061.
Get access

Abstract

A unified approach to model the general CVD process, utilizing the versatility and flexibility of bond graph methods, is presented. The bond graph representations for important CVD sub-processes are derived. The application of these elements is illustrated through hypothetical examples of CVD processes. It is also shown that several different CVD processes can be handled by a single bond graph computer program.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 168 , 1989 , 37
Copyright
Copyright © Materials Research Society 1990

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1]Rosenberg, R. C. and Karnopp, D. C., Introduction to Physical System Dynamics, McGraw-Hill (1983).Google Scholar
[2]Thoma, J. U., Introduction to Bond Graphs and Their Applications, Pergamon press (1975).Google Scholar
[3]Wellstead, P. E., Introduction to Physical System Modelling, Academic Press (1979).Google Scholar
[4]Kalidindi, S. R. and Desu, S. B., J. Appl. Phys., to be published.Google Scholar