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BN protective coating for high temperature applications

Published online by Cambridge University Press:  17 March 2011

Ravi Bathe ,
R.D. Vispute ,
Daniel Habersat ,
Ichiro Takeuchi ,
R.P. Sharma ,
T. Venkatesan ,
T.S. Zheleva  and
Ken Jones
Ravi Bathe
Affiliation:
CSR, Department of Physics, University of Maryland, College Park, MD 20742.
R.D. Vispute
Affiliation:
CSR, Department of Physics, University of Maryland, College Park, MD 20742.
Daniel Habersat
Affiliation:
CSR, Department of Physics, University of Maryland, College Park, MD 20742.
Ichiro Takeuchi
Affiliation:
CSR, Department of Physics, University of Maryland, College Park, MD 20742.
R.P. Sharma
Affiliation:
CSR, Department of Physics, University of Maryland, College Park, MD 20742.
T. Venkatesan
Affiliation:
CSR, Department of Physics, University of Maryland, College Park, MD 20742.
T.S. Zheleva
Affiliation:
United States Army Research Laboratory, Adelphi, MD 20783.
Ken Jones
Affiliation:
United States Army Research Laboratory, Adelphi, MD 20783.
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Abstract

We report on the fabrication, characterization, and processing of boron nitride films for use in high temperature applications such as field passivation, capping layers for thermal annealing of SiC, and protecting metallic filaments from their working environments. The BN films have been fabricated by pulsed laser deposition and spray techniques. The deposited films were characterized by X-ray Diffraction, Fourier Transform Infrared Spectroscopy, Ultraviolet-Visible Spectroscopy, Rutherford Backscattering Spectrometry and Transmission Electron Microscopy. The BN films deposited in the temperature range of 200-500°C have been found to be poorly crystalline, whereas the films fabricated above 600°C have been found to be microcrystalline. The as-deposited films were annealed at various temperatures ranging from 900°C to 1700°C in order to densify the films and study the applicability of the coatings. An AlN buffer layer was also applied in a few cases to improve chemical bonding with the substrate. Adhesion of the films with the heater components was greatly improved for high temperature annealed samples due to good interfacial bonding with the substrate material. Our results on the properties of BN films with an emphasis on characterization, processing, and implications for high temperature applications are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 697: Symposium P – Surface Engineering 2001--Fundamentals and Applications , January 2001 , P3.3
Copyright
Copyright © Materials Research Society 2002

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