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Atomic Arrangements in Short period MO-GE Multilayers Determined by X-Ray Anomalous Scattering and EXAFS

Published online by Cambridge University Press:  25 February 2011

Lane Wilson
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
Arthur Bienenstock
Affiliation:
Department of Applied Physics, Stanford University, Stanford, California 94305
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Abstract

Studies of atomic arrangements in amorphous and crystalline, short period Mo-Ge multilayers using synchrotron radiation X-ray diffraction (transmission and reflection), supplemented by EXAFS, are described. Differential anomalous scattering and EXAFS were utilized to determine the environment of each species. Intermixing, as well as a BCC epitaxial Ge structure, are among the observed structural characteristics. A wide range of structural variations is present indicating that specification of the layer thicknesses or composition profile alone is insufficient for characterization of the multilayers.

Type
Research Article
Copyright
Copyright © Materials Research Society 1988

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