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Applications of Surface Analysis by Laser Ionization (Sali) to Insulators and II–VI Compounds

Published online by Cambridge University Press:  22 February 2011

C. H. Becker ,
C. M. Stahle  and
D. J. Thomson
C. H. Becker
Affiliation:
Chemical Physics Laboratory, SRI International, Menlo Park, CA 94025
C. M. Stahle
Affiliation:
Stanford Electronics Laboratories, Stanford University, Stanford, CA 94305
D. J. Thomson
Affiliation:
Stanford Electronics Laboratories, Stanford University, Stanford, CA 94305
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Abstract

Examples of the mass spectrometry of sputtered or evaporating neutral species obtained by SALI are presented for NBS Glass 610 (primarily a silicate), and an anodic oxide of HgCdTe. For the NBS glass, a SIMS spectra was recorded for comparison with SALI using the same apparatus. The raw SALI spectra of the glass is in semiquantitative accord with the known composition, in contrast to SIMS. Relative secondary ion yields can be determined for unknown complex materials by comparing SALI and SIMS spectra. Depth profiling measurements on the anodic oxides of Hg1−xCdxTe show a significant though depleted concentration of Hg in the oxide in contrast to numerous other analyses; this result is corroborated by RBS studies. Hg and also Te evaporation is monitored in real-time by SALI with large dynamic range capabilities.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 48: Symposium E – Applied Materials Characterization , 1985 , 447
Copyright
Copyright © Materials Research Society 1985

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References

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