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Application of the Helium Ion Microscope as a Sculpting Tool for Nanosamples

Published online by Cambridge University Press:  31 July 2012

Maria Rudneva ,
Emile van Veldhoven ,
Sairam Malladi ,
Diederik Maas  and
Henny W. Zandbergen
Maria Rudneva
Affiliation:
Delft University of Technology, Kavli Institute of Nanoscience, Lorentzweg 1,2628 CJ Delft, The Netherlands.
Emile van Veldhoven
Affiliation:
TNO - van Leeuwenhoek Laboratory, Stieltjesweg 1, 2826 CK Delft, The Netherlands.
Sairam Malladi
Affiliation:
Delft University of Technology, Kavli Institute of Nanoscience, Lorentzweg 1,2628 CJ Delft, The Netherlands.
Diederik Maas
Affiliation:
TNO - van Leeuwenhoek Laboratory, Stieltjesweg 1, 2826 CK Delft, The Netherlands.
Henny W. Zandbergen
Affiliation:
Delft University of Technology, Kavli Institute of Nanoscience, Lorentzweg 1,2628 CJ Delft, The Netherlands.
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Abstract

In this paper we propose a few helium ion microscope (HIM)-based methods for sample preparation and modification. In particular we report the use of the HIM to make thin wedge SrTiO3 samples without significant artifacts, the possibility to reshape thin metal lines on an electron transparent membrane and the new method of HIM sample preparation by in situ heating of the samples during He-beam illumination.

Keywords

nanostructureion-beam processingSi
Type
Articles
Information
MRS Online Proceedings Library (OPL) , Volume 1455: Symposium II – Nanoscale Materials Modification by Photon, Ion, and Electron Beams , 2012 , mrss12-1455-ii10-01
Copyright
Copyright © Materials Research Society 2012

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References

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