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Application of a Position Sensitive Atom Probe to the Analysis of the Chemistry and Morphology of Multi-Quantum Well Interfaces

Published online by Cambridge University Press:  21 February 2011

Alfred Cerezo
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
J. Alex Liddle
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
Chris R.M. Grovenor
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
Andrew G. Norman
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
George D.W. Smith
Affiliation:
Department of Metallurgy and Science of Materials, Oxford University, Parks Road, Oxford, OX1 3PH, UK.
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Abstract

A position sensitive detector has been added to the Oxford atom probe facility, allowing the microchemistry of field ion specimens to be analysed with excellent chemical specificity and a lateral and depth resolution of better than 0.5nm. This paper presents some recent results obtained with this equipment on the chemistry and morphology of interfaces in multi-quantum well samples, illustrating the power of the technique in obtaining very detailed information on microstructural features with dimensions less than 1nm.

Type
Research Article
Copyright
Copyright © Materials Research Society 1989

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References

REFERENCES

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