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Analysis of Anomalous Peak Heights in DlTS of MBE-Grown Aluminum Gallium Arsenide
Published online by Cambridge University Press: 26 February 2011
Abstract
DLTS data taken on MBE grown AlGaAs films show peak heights which increase, maximize, and then decrease with increasing sample temperature. This behavior is difficult to explain within the context of conventional DLTS analysis. We suggest that the data can be accounted for by a trap with a temperature dependent capture cross section in conjunction with a model described by Lee and Borrego in which electron and hole emission rates are comparable. Using this analysis, we obtain an effective trap depth Eeff of 0.35 eV and a capture cross section activation energy Eσ 0.25 eV.
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- Copyright © Materials Research Society 1991