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An Overview of Plasma Processing

Published online by Cambridge University Press:  15 February 2011

Julian Szekely
Julian Szekely*
Affiliation:
Department of Materials Science and Engineering and Center for Materials Processing, Massachusetts Institute of Technology, Cambridge, Massachusetts 02139
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Abstract

An overview is presented of the plasma processing of materials. The principal components of this overview include the definition and classification of plasmas of interest in materials processing, the methods of plasma generation and the basic engineering principles that govern plasma phenomena. Here emphasis is placed on both plasma theory and on the experimental verification of the models. This is followed by a brief description of principal plasma applications, including thermal plasmas used in melting, refining, plasma deposition and plasma synthesis and low pressure plasmas used in synthesis and in the processing of electronic materials.

The review is concluded by a brief discussion of future prospects for plasma technology, where the main developments envisioned are in the area of improved coatings, the processing of electronic materials, melting and refining of refractory metals and superalloys and finally the possibility of more widespread use for plasma systems in extractive metallurgy.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 30: Symposium L – Plasma Processing and Synthesis of Materials I , 1983 , 1
Copyright
Copyright © Materials Research Society 1984

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References

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