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An Analytic Approach to the Radiation Fields of Tubular Halogen Lamp Arrangements in RTP Reactor Blocks

Published online by Cambridge University Press:  15 February 2011

Thomas Theiler
Thomas Theiler*
Affiliation:
A.S.T. elektronik GmbH, Daimlerstraße 10, D-89160 Dornstadt, Germany.
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Abstract

Starting with basic physical radiation principles and with Beers law formulas for the radiation characteristics of arrays of pointlike radiation sources and tubular halogen lamps are analytically derived. Different arrangements of tubular halogen lamps are considered and compared with each other. Homogeneity criteria are worked out and it is demonstrated that the minimum homogeneity distance between a plane in which all filaments are arranged parallel to each other, and an object depends only on the distance between two neighbouring filaments and thus can be given by a simple number. Interesting aspects for RTP equipment manufacturers as well as for users are demonstrated by comparing different lamp arrangements with each other: In crossed lamp fields latticelike inhomogeneity knots arise in the object plane at points where the lamp filaments of the upper and the lower lamp plane cross. If the filaments are arranged parallel to each other in two filament planes, very homogeneous results are obtained when the filaments of the two planes interlace.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 389: Symposium R – Modedling and Simulation of Thin-Film Processing , 1995 , 327
Copyright
Copyright © Materials Research Society 1995

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References

REFERENCES

1 Kakoschke, R.; Nuclear Instr. and Methods in Phys. Research B 37 / 38, 753 (1989)Google Scholar
2 Kakoschke, R., Bussmann, E., Foil, H.; Appl. Phys. A S2, 52 (1991)Google Scholar
3 Tillmann, A.; Mater. Res. Soc. Proc. 342, 377 (1994)Google Scholar
4 Knutson, K.L., Merchant, T.P., Cole, J.V., Hebb, J.P., Mihopoulos, T.G., in 2nd International Rapid Thermal Processing Conference RTP ‘94, edited by Jensen, K.; Fair, R.B., Lojek, B. (Monterey: August 31 - September 2, 1994) pp. 146–152 Google Scholar
5 Kiether, W.J., Fordham, M.J., Seungil, Yu, Silva Neto, A.J., Conrad, K.A., Hauser, J.R., Sorrell, F. Y., Wortman, J.J., in 2nd International Rapid Thermal Processing Conference RTP ‘94. edited by K. Jensen; R.B. Fair, B. Lojek (Monterey: August 31 - September 2, 1994) pp. 96 – 101Google Scholar
6 Tillmann, A., Cuchiaro, J.; J. in 2nd International Rapid Thermal Processing Conference RTP ‘94, edited by Jensen, K.; Fair, R.B., Lojek, B. (Monterey: August 31 - September 2, 1994), pp. 134–138 Google Scholar
7 Dilhac, J-M., Nolhier, N. in 1st International Rapid Thermal Processing Conference RTP ‘93 Vol. 1 edited by Fair, R.B., Lojek, B., (Scottsdale: September 8-10, 1993) pp. 12–18 Google Scholar
8 Brcka, J., Breza, J., Mateckova, M., Grno, J.; Elektrotechn. Cas., 43, No. 10, 289–292 (1992)Google Scholar