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Amorphous Silicon Sensor Arrays for X-Ray and Document Imaging

Published online by Cambridge University Press:  10 February 2011

R. A. Street ,
R. B. Apte ,
S. E. Ready ,
R. L. Weisfield  and
P. Nylen
R. A. Street
Affiliation:
Xerox PARC, 3333 Coyote Hill Road, Palo Alto, CA 94304, [email protected].
R. B. Apte
Affiliation:
Xerox PARC, 3333 Coyote Hill Road, Palo Alto, CA 94304, [email protected].
S. E. Ready
Affiliation:
Xerox PARC, 3333 Coyote Hill Road, Palo Alto, CA 94304, [email protected].
R. L. Weisfield
Affiliation:
dpiX, 3406 Hillview Avenue, Palo Alto, CA 94304
P. Nylen
Affiliation:
Dept of Physics, Stockholm University, Stockholm, Sweden
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Abstract

Large area amorphous silicon image sensor arrays are important for x-ray medical imaging and document scanning as well as a variety of other applications where large sensor size is required. The paper first summarizes the present state of the flat panel x-ray imager technology, and compares the two main approaches for x-ray detection. We then describe the performance of a new, large area, high resolution, radiographic imager based on a single amorphous silicon array with 2304×3200 pixels, and an active area of 30×40 cm (12×1 6”).

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 487: Symposium I – Semiconductors for Room-Temperature Radiation II , 1997 , 399
Copyright
Copyright © Materials Research Society 1998

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References

1. Street, R. A., Nelson, S., Antonuk, L. and Mendez, V. Perez, MRS Symp. 192, 441 (1990).Google Scholar
2. Graeve, T., Huang, E. W., Alexander, S. M. and Li, Y., SPIE Proc., 2415, 177 (1995).Google Scholar
3. Zhao, W., and Rowlands, J. A., Medical Imaging VI: Instrumentation, SPIE Proc., 1651, 134 (1992).Google Scholar
4. Street, R. A., Hydrogenated amorphous silicon, Cambridge University Press 1991.Google Scholar
5. Street, R. A., Appl. Phys. Lett., 57, 1334 (1990).Google Scholar
6. Street, R. A., Weisfield, R. L., Apte, R. B., Ready, S. E., Moore, A., Nguyen, M., Jackson, W. B. and Nylen, P., Thin Solid Films, 296, 172 (1997).Google Scholar
7. Scheibel, U., Conrads, N., Jung, N., Weibrecht, M., Wieczorek, H, Zaengel, T., Powell, M. J., French, I. D., and Glasse, C., Medical Imaging, SPIE Proc. 2163, 129, (1994)Google Scholar
8. Antonuk, L. E., El-Mohri, Y., Siewerdsen, J. H., Yorkston, J., Huang, W., Scarpine, V. E. and Street, R. A., Medical Physics, 24, 51, 1997.Google Scholar
9. Siewerdsen, J. H., Antonuk, L. E., El-Mohri, Y., Yorkston, J., Huang, W., Boudry, J. M., and Cunningham, I. A., Medical Physics, 24, 71, 1997.Google Scholar
10. Antonuk, L. E., El-Mohri, Y., Huang, W., Lee, K. W., Maolinbay, M., Scarpine, V. E., Siewerdsen, J. H., Verma, M., Yorkston, J. and Street, R. A., The Physics of Medical Imaging, Proc. SPIE, 3032, 2, 1997.Google Scholar
11. Powell, M. J., French, I. D., Hughes, J. R., Bird, N. C., Davies, O. S., Glasse, C. and Curren, J. E., MRS Symp. Proc. 258, 1127 (1992).Google Scholar
12. Apte, R., Nickel, N., Street, R. A., Weisfierld, R., Wu, X.-D., Ready, S., Nguyen, M., Nylen, P., MRS Symp. Proc., 420,177 (1996).Google Scholar
13. Weisfield, R. L., Street, R. A., Apte, R. B., Moore, A., The Physics of Medical Imaging, Proc. SPIE, 3032, 14, 1997.Google Scholar
14. Colbeth, R. E., Allen, M. J., Day, D. J., Gilblom, D. L., Klausmeier-Brown, M. E., Pavkovich, J., Seppi, E. J. and Shapiro, E. G., The Physics of Medical Imaging, Proc. SPIE, 3032, 42, 1997.Google Scholar
15. Chabbal, J., Chaussat, C., Ducourant, T., Fritsch, L., Michailos, J., Spinnler, V., Vieux, G., Arques, M., Hahm, G., Hoheisel, M., Horbaschek, H., Schulz, R. and Spahn, M., The Physics of Medical Imaging, Proc. SPIE, 2708, 499, (1996)Google Scholar
16. Rowlands, J. A., Zhao, W., Blevis, I., Pang, G., Ji, W. G., Germann, S., Kasap, S. O., Waechter, D. and Huang, Z., The Physics of Medical Imaging, Proc. SPIE, 3032, 97, (1997).Google Scholar
17. Lee, D. L., Jeromin, L. S. and Cheung, L. K., The Physics of Medical Imaging, Proc. SPIE, 2432, 237, (1995).Google Scholar
18. Lee, D. L., Cheung, L. K., Jeromin, L. S., Palecki, E. F. and Rodericks, B., The Physics of Medical Imaging, Proc. SPIE, 3032, 88, (1997).Google Scholar
19. Shah, K. S., Bennett, P., Klugerman, M., Moy, L. P., Entine, G., Ouimette, D. and Aikens, R., The Physics of Medical Imaging, Proc. SPIE, 3032, 395, (1997).Google Scholar
20. Street, R. A., Apte, R. B., Granberg, T., Mei, P., Ready, S. E., Shah, K. S. and Weisfield, R. L., Proc. 17th Int. Conf. on Amorphous and Microcrystalline Semiconductors, in press.Google Scholar
21. Shah, K. S. et al, these proceedings.Google Scholar
22. Ross, S., Zentai, G., Shah, K. S., Alkire, R. W., Naday, I and Westbrook, E. M., Nucl. Inst. and Methods, in press.Google Scholar
23. Fujieda, I., Street, R. A., Weisfield, R. L., Nelson, S., Nylen, P., Perez-Mendez, V., and Cho, G., Jpn. J. Appl. Phys, 32, 198, 1993.Google Scholar