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Amorphous and Crystalline Phase Formation by Ion-Mixing of Ru-Zr and Ru-Ti

Published online by Cambridge University Press:  26 February 2011

Y-T. Cheng ,
W. L. Johnson  and
M-A. Nicolet
Y-T. Cheng
Affiliation:
California Institute of Technology,Pasadena,California 91125
W. L. Johnson
Affiliation:
California Institute of Technology,Pasadena,California 91125
M-A. Nicolet
Affiliation:
California Institute of Technology,Pasadena,California 91125
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Abstract

Ion mixing of multilayered Ru-Zr and Ru-Ti at different compositions and substrate temperatures produced various metastable phases. The applicability of previously proposed rules regarding amorphous phase formation are examined. Effects of point defect in amorphous phase formation by ion mixing are discussed.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 37: Symposium D – Layered Structures, Epitaxy, and Interfaces , 1984 , 565
Copyright
Copyright © Materials Research Society 1985

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