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Ag-Sb-S Thin Films Prepared by RF Magnetron Sputtering and Their Properties

Published online by Cambridge University Press:  01 February 2011

Jan Gutwirth ,
Tomas Wagner ,
Milan Vlcek ,
Cestmir Drasar ,
Ludvik Benes ,
Martin Hrdlicka ,
Miloslav Frumar ,
Jiri Schwarz  and
Helena Ticha
Jan Gutwirth
Affiliation:
[email protected], University of Pardubice, General and Inorganic Chemistry and Research centre, Legion's sq. 565, Pardubice, -, 53210, Czech Republic
Tomas Wagner
Affiliation:
[email protected], University of Pardubice, Department of General and Inoraganic Chemistry, Legion's sq. 565, Pardubice, 532 10, Czech Republic
Milan Vlcek
Affiliation:
[email protected], University of Pardubice, Joint Laboratory of Solid State Cemistry of UPa and AS CR, Studentska 84, Pardubice, 532 10, Czech Republic
Cestmir Drasar
Affiliation:
[email protected], University of Pardubice, Department of Physics, Studentska 84, Pardubice, 532 10, Czech Republic
Ludvik Benes
Affiliation:
[email protected], University of Pardubice, Joint Laboratory of Solid State Cemistry of UPa and AS CR, Studentska 84, Pardubice, 532 10, Czech Republic
Martin Hrdlicka
Affiliation:
[email protected], University of Pardubice, Department of General and Inoraganic Chemistry, Legion's sq. 565, Pardubice, 532 10, Czech Republic
Miloslav Frumar
Affiliation:
[email protected], University of Pardubice, Department of General and Inoraganic Chemistry, Legion's sq. 565, Pardubice, 532 10, Czech Republic
Jiri Schwarz
Affiliation:
[email protected], University of Pardubice, Department of General and Inoraganic Chemistry, Legion's sq. 565, Pardubice, 532 10, Czech Republic
Helena Ticha
Affiliation:
[email protected], University of Pardubice, Department of General and Inoraganic Chemistry, Legion's sq. 565, Pardubice, 532 10, Czech Republic
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Abstract

One of the recent applications of thin chalcogenide films is rewritable optical data recording. This technology is based on reversible phase transition between crystalline and amorphous state and vice versa. Dominant materials for rewritable optical recording are Ge Sb Te and Ag In Sb Te alloys. Material research still continues due to need of increasing storage capacity and data rates. Thin Ag Sb S films were prepared by RF magnetron sputtering as potential candidates for rewritable optical data storage films.

There were prepared polycrystalline bulks of AgSbS2. Composition and homogeneity of these bulks were checked by scanning electron microscopy with energy dispersive analysis (SEM EDX) structure and bonding relations were studied by Raman spectroscopy and × ray diffraction (XRD).

Targets for RF magnetron sputtering were prepared from pulverized bulks by hot pressing technique. Targets were characterized the same way as bulks.

Composition and homogeneity of prepared thin films were characterized by SEM EDX, character (amorphous/crystalline) was studied by XRD. Optical properties (spectral dependence of refractive index) were evaluated on basis of UV Vis NIR spectroscopy and variable angle spectral ellipsometry (VASE).

Crystallization abilities were traced by thermal dependence of optical transmission of prepared thin films.

Keywords

sputteringamorphousoptical properties
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 918: Symposium H – Chalcogenide Alloys for Reconfigurable Electronics , 2006 , 0918-H07-01-G08-01
Copyright
Copyright © Materials Research Society 2006

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