Hostname: page-component-586b7cd67f-l7hp2 Total loading time: 0 Render date: 2024-11-29T09:35:05.236Z Has data issue: false hasContentIssue false
  • English
  • Français

Afm Probe Tip and Image Reconstruction from Noisy Measurements

Published online by Cambridge University Press:  15 February 2011

H. Fischer  and
J. Nittmann
H. Fischer
Affiliation:
Campusbased Engineering Center Vienna, Digital Equipment Österreich AG 1040 Vienna, AUSTRIA
J. Nittmann
Affiliation:
Campusbased Engineering Center Vienna, Digital Equipment Österreich AG 1040 Vienna, AUSTRIA
Get access

Abstract

We have tested the application of a recently developed probe tip reconstruction method to AFM images from semiconductor surfaces. The method by Villarrubia is the first to enable the construction of a probe tip from the AFM measurements alone. Here is a summary on how this method can be implemented. Experience shows that for some real surface data, experimental noise prevents the reconstruction of realistic tips. Therefore we present some preliminary results of how noise reduction methods applied to the measurements can provide access to more realistic tip shapes which are the basis for a useful image reconstruction.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 406: Symposium L – Diagnostic Techniques for Semiconductor Materials Processing , 1995 , 201
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

[1] Moinpour, M., Watt, V.H.C., Bower, R., Sundararaman, R., Journal of Materials Science Letters 14, 96–98 (1995),Google Scholar
[2] Yoshinubo, L., Iwamoto, A., Iwasaki, H., App. Phys. Vol.33, pp. 383–387, (1994),Google Scholar
[3] Keller, D.J., Franke, F.S., Surface Science 294, 409 (1993),Google Scholar
[4] Keller, D.,Surface Science 253, 353 (1991),Google Scholar
[5] Atamny, F., Baiker, A., Surface Science 323, L314–L318, (1995),Google Scholar
[6] Villarubia, J. S., Surface Science 231, 3, pp.287 (1994)Google Scholar
[7] Serra, J., Vol. I+II, N.Y., Academic (1982),Google Scholar
[8] Sternberg, Stanley R., Computer Vision, Graphics, and Image Processing 35,333–355(1986),Google Scholar