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Adsorption-Induced Failure Modes of Thin-Film Resonators

Published online by Cambridge University Press:  21 March 2011

R. Kazinczi ,
J.R. Mollinger  and
A. Bossche
R. Kazinczi
Affiliation:
Delft University of Technology, DIMES Mekelweg 4, 2628 CD Delft, The Netherlands E-mail: [email protected]
J.R. Mollinger
Affiliation:
Delft University of Technology, DIMES Mekelweg 4, 2628 CD Delft, The Netherlands E-mail: [email protected]
A. Bossche
Affiliation:
Delft University of Technology, DIMES Mekelweg 4, 2628 CD Delft, The Netherlands E-mail: [email protected]
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Abstract

The mechanical and resonant properties of thin film resonators are influenced by the surrounding environment. Adsorption- and surface oxidation-induced stiffening effect was observed on silicon nitride and silicon carbide cantilever beams. The resonance frequency increased logarithmically in time upon exposure to ambient air. The variations of surface stress and spring constant of the SiNx cantilever beam were calculated. Further oxynitride formation on the surface increased the stability of the resonators. The shock response of the structures was studied in various environments. The resonance frequency abruptly dropped due to cracking of the absorbed surface layer, than recovered logarithmically. The initial drop and the recovery rate is environment dependant. Humidity increased, while argon and nitrogen rich environments mitigated the degrading effects. The SiCx is more inert to the environmental effects and proved to be a promising candidate as structural material in resonant MEMS devices.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 695: Symposium L – Thin Films: Stresses and Mechanical Properties IX , 2001 , L8.8.1
Copyright
Copyright © Materials Research Society 2002

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References

REFERENCES

[1] Vanderbilt, D., Phys. Rev. Lett., 59, p. 1456, 1987 Google Scholar
[2] Gossman, H.J., Bean, J.C., Feldman, L.C., McRae, D.G., Robinson, I.K., Phys. Rev. Lett., 55, p. 1106, 1985 Google Scholar
[3] Becker, R.S., Klitsner, T., Vickers, J.S., J. Microsc. Oxford, 152, p. 157, 1988 Google Scholar
[4] Meade, R.D., Vanderbilt, D., Phys. Rev. Lett., 63 (13), p. 1404, 1989 Google Scholar
[5] Cohen, R.M., Janata, J., Thin Solid Films, 109, pp. 329–338, 1983 Google Scholar
[6] Raider, S.I., Flitsch, R., Pliskin, W.A., Electrochem, J.. Soc.: Solid-State Science and Technology, 123 (4), pp. 560–565, 1976 Google Scholar
[7] Avila, A., Montero, I., Galan, L., Ripalda, J.M., Levy, R., J. Appl. Phys., 89(1), p. 212, 2001 Google Scholar
[8] Ibach, H., J. Vac. Sci. Technol., A12(4), pp. 2240–2245, 1994 Google Scholar
[9] Needs, R.J., Phys. Rev. Lett., 58, p. 53, 1987 Google Scholar
[10] Cammarata, R.C., Surf. Sci., 279, p. 341, 1992 Google Scholar
[11] Fiorentini, V., Methfessel, M., Scheffler, M., Phys. Rev. Lett., 71, p. 1051, 1993 Google Scholar
[12] Ogale, A.S., Brotherton, S.D., van, A.H. Ommen, Politiek, J., Ligthart, H.J., J. Vac. Sci. Technol., B1, pp. 398–400, 1983 Google Scholar
[13] Herring, C., in “Structure and Properties of Solid Surfaces”, edited by Gomer, R. and Smith, C.S., The University of Chicago Press, 1953 Google Scholar
[14] Millins, W.W., in “Metal Surfaces”, American Society for Metals, Cleveland, Ohio, 1963 Google Scholar
[15] Rayleigh, Lord, “Theory of Sound”, 2nd Ed. 1, pp. 111 & 287Google Scholar
[16] Timoshenko, S., “Vibration problems in engineering”, Constable & Company Ltd., London, 1928, p 255 Google Scholar
[17] Chen, G.Y., Thundat, T., Wachter, E.A., Warmack, R.J., J. Appl. Phys., 77 (8), 1995, pp. 3618–3622 Google Scholar
[18] Kazinczi, R., Mollinger, J.R., Bossche, A., Sensors and Actuators A, 85, pp. 84–89, 2000 Google Scholar
[19] Kazinczi, R., Mollinger, J.R., Bossche, A., Proc. of SPIE Conf. On Device Characterization in Micromachining II, 3875, pp. 174–183, 1999 Google Scholar
[20] Kazinczi, R., Mollinger, J.R., Bossche, A., Proc. of IEEE Micro-Electro-Mechanical Systems (MEMS ) - 2000, 2, pp. 221–225, 2000 Google Scholar
[21] Butler, M.A., Martin, S.J., Spates, J.J., Mitchell, M-A., Proc. of IEEE Transducers '97, pp. 1031–1034, Chicago, USA, 1997 Google Scholar
[22] Lee, S.S., White, R.M., Sensors and Actuators A, 71, pp. 153–157, 1998 Google Scholar
[23] Marxer, C., M.-A. Gretillat, Vogel, P., Sensors and Actuators A, 61, pp. 449–454, 1997 Google Scholar
[24] Kazinczi, R., Mollinger, J.R., Bossche, A., Proc. SPIE, Smart Materials and MEMS, 4234, pp. 258–268, 2000, Melbourne, Australia Google Scholar