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The Adsorption Behaviors of Citric Acid on Abrasive Particles in Cu CMP Slurry

Published online by Cambridge University Press:  01 February 2011

Young-Jae Kang ,
Yi-Koan Hong ,
Jae-Hoon Song ,
In-Kwon Kim  and
Jin-Goo Park
Young-Jae Kang
Affiliation:
Div. of Materials and Chemical Engineering, Hanyang University, Ansan, 426-791, Korea
Yi-Koan Hong
Affiliation:
Div. of Materials and Chemical Engineering, Hanyang University, Ansan, 426-791, Korea
Jae-Hoon Song
Affiliation:
Div. of Materials and Chemical Engineering, Hanyang University, Ansan, 426-791, Korea
In-Kwon Kim
Affiliation:
Div. of Materials and Chemical Engineering, Hanyang University, Ansan, 426-791, Korea
Jin-Goo Park
Affiliation:
Div. of Materials and Chemical Engineering, Hanyang University, Ansan, 426-791, Korea
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Abstract

The interaction between Cu surface and abrasive particles in slurry solution was characterized. The adsorption behavior of the citrate ions was dependent on the pH of the slurry and the concentration of the citric acid. The adsorption of citrate ions generated a highly negative charge on the alumina surface and shifted isoelectric point (IEP) to lower pH values. The Cu removal rate of alumina slurry was higher than that of colloidal silica based slurry in the investigated pH ranges. Although lower friction forces of Cu were observed in alumina based slurry of pH 4, 6 and 8, a higher friction force was observed at pH 2. This high friction force was attributed to the positive zeta potential and greater adhesion force of particle. It indicates that the magnitudes of particle adhesions on Cu surfaces in slurries can be directly related to the frictional behavior during CMP process.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 867: Symposium W – Chemical-Mechanical Planarization-Integration, Technology and Reliability , 2005 , W7.5
Copyright
Copyright © Materials Research Society 2005

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