Hostname: page-component-586b7cd67f-tf8b9 Total loading time: 0 Render date: 2024-11-29T08:18:22.010Z Has data issue: false hasContentIssue false
  • English
  • Français

Adhesion of Metals to Mixed Oxide Coatings (Al & Cr, Mo, OR W) Prepared by Spray Pyrolysis of Organometallics.

Published online by Cambridge University Press:  25 February 2011

James M. Burlitch ,
Gerard J. Demott  and
David L. Kohlstedt
James M. Burlitch
Affiliation:
Dept. of Chemistry, Cornell University, Ithaca, NY 14853-1301.
Gerard J. Demott
Affiliation:
Dept. of Chemistry, Cornell University, Ithaca, NY 14853-1301.
David L. Kohlstedt
Affiliation:
Dept. of Materials Science & Engineering, Cornell University, Ithaca, NY 14853.
Get access

Abstract

Spray pyrolysis of the mixed metal organometallics, Al[M(CO)3C5H5]3 (M is Cr, Mo or W), prepared in tetrahydrofuran from the mercury analogues and aluminum metal, gave mixed oxide gels on heated alumina substrates. Air was used as the propellant for M = Cr, whereas oxygen was used for M = Mo or W. Mixtures of Al[Cr(CO)3C5 H5]3 and Al(O-i-C3H8)3 having a Cr/Al ratio of 0.02 to 0.93 were used to prepare gels with intermediate dopant concentrations. When calcined at 500 °C, the gels produced amorphous coatings of two-component oxides that were characterized by SEM and EDS methods. The strength of adhesion of a E-beam evaporated chromium metal overlayer to the coating, as measured by a continuous microindentation method, increased in the order Cr < Mo ≅ W; adhesion was found to be directly proportional to the effective free energy of formation of the oxide mixture.

Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 131: Symposium E – Chemical Perspectives of Microelectronic Materials I , 1988 , 453
Copyright
Copyright © Materials Research Society 1989

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

REFERENCES

1. (a) Bhatgadde, L. G. and Mahapatra, S., Metal Finishing, January, 55–57 (1987); (b) P. H. Holloway, Gold Bulletin 12 (3), 99–106 (1979).Google Scholar
2. (a) Borom, M. P. and Pask, J. A., J. Am. Ceram. Soc. 49, 1 (1966); (b) M. Caulton, W. L. Sked, and F. S. Wozniak, RCA Review 40,115 (1979); (c) R. W. Pierce and J. G. Vaughan, IEEE Trans. on Comp., Hybrids and Manuf. Tech. 6, 202 (1983); (d) K. L. Chopra. Thin Film Phenomena, chapter: “Mechanical effects in thin films.”(McGraw-Hill Book Co., New York 1969).Google Scholar
3. (a) Moore, D. G., Pitts, J. W., Richmond, J. C. and Harrison, W. N., J. Am. Ceram. Soc. 37, 1 (1954); (b) A. Dietzel, Sprechsaal 68, 3, (1935).Google Scholar
4. (a) Kanai, H., MS thesis, Cornell University, 1987; (b) G. J. DeMott, H. Kanai and D. L. Kohlstedt, submitted for publication.Google Scholar
5. (a) Stone, D., LaFontaine, W. R., Alexopoulos, P., Wu, T. -W. and Li, C. -Y., J. Materials Res. 3, 141 (1988); (b) G. J. DeMott, W. R. LaFontaine, D. L. Kohlstedt, and C. -Y. Li, submitted for publication.CrossRefGoogle Scholar
6. Petersen, R. B., Stezowski, J. J., Wan, C., Burlitch, J. M. and Hughes, R. E., J. Am. Chem. Soc. 93, 3532 (1971).Google Scholar
7. DeMott, G. J., PhD thesis, Cornell University, 1989.Google Scholar
8. Petersen, R. B., PhD thesis, Cornell University, 1973.Google Scholar
9. Burlitch, J. M., How to Use Ace No-Air Glassware (Ace Glass Co. Vineland, N.J., Bulletin No. 3841).Google Scholar
10. Burnett, P. J. and Page, T. F., J. Materials Sci. 19, 845 (1984).Google Scholar
11. Lawn, B. R., Hockey, B. J. and Wiederhorn, S. M., J. Materials Res. 15, 1207 (1980).Google Scholar
12. King, R. B., in Organometallic Syntheses, Vol.1, edited by Eisch, J. J. and King, R. B. (Academic Press, New York, 1965), p. 111.Google Scholar
13. Pepper, S. V., J. Appl. Physics 47, 801 (1976).Google Scholar
14. Kubaschewski, O. and Alcock, C. B., Metallurgical Thermochemistry, (Pergamon Press, Oxford, 1983).Google Scholar