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A 29Si-NMR Investigation of Amorphous Hydrogenated Silicon Nitride
Published online by Cambridge University Press: 28 February 2011
Abstract
We present the results of a spectroscopic study of amorphous hydrogenated silicon nitride. The nitride was prepared by plasma enhanced chemical vapor deposition and was studied with infrared absorption (IR) and solid-state nuclear magnetic resonance (NMR) spectroscopies. This nitride film shows a particularly interesting distribution of hydrogen: hydrogen atoms are nearly exclusively bound to nitrogen.
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