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0.5 MeV Submicron Ion Probe System for RBS/PIXE.
Published online by Cambridge University Press: 25 February 2011
Abstract
A nuclear microprobe-forming system for the microscopic RBS/PIXE measurement of micro devices has been developed and installed at the Research Center for Extreme Materials, Osaka University. The use of precision quadrupole magnets and an objective collimator ensures a final spot size of less than 1μm.
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- Research Article
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- Copyright © Materials Research Society 1989
References
REFERENCES
1.
Takai, M., Gamo, K., Masuda, K. and Namba, S.: Japan. J. Appl. Phys.
12, 1926 (1973)Google Scholar
2.
Takai, M., Gamo, K., Masuda, K. and Namba, S.: Japan. J. Appl. Phys.
14, 1935 (1975)Google Scholar
3.
Backscattering Spectroscopy, edited by Chu, W. K., Mayer, J. W. and Nicolet, M. A. (Academic Press, New York, 1978)Google Scholar
7.
Kneis, H., Martin, B., Nobiling, R., Povh, B. and Traxel, K.: Nucl. Instrum. and Methods.
197, 79 (1982)Google Scholar
8.
Takai, M., Matsunaga, K., Inoue, K., Izumi, M., Gamo, K., Satou, M., and Namba, S., Japan. J. Appl. Phys.
26, L550 (1987)Google Scholar
9.
Takai, M., Kinomura, A., Inoue, K., Matsunaga, K., Izumi, M., Gamo, K., Namba, S. and Satou, M.: Nucl. Instrum. and Methods. B30, 260 (1988)CrossRefGoogle Scholar
10.
Inoue, K., Takai, M., Matsunaga, K., Izumi, M., Gamo, K., Namba, S., and Satou, M.: Nucl. Instrum. and Methods. B30, 580 (1988)Google Scholar
11.
Kinomura, A., Takai, M., Inoue, K., Matsunaga, K., Izumi, M., Matsuo, T., Gamo, K., Namba, S. and Satou, M.: Nucl. Instrum. and Methods. B33, 862 (1988)Google Scholar
12.
Takai, M., Kinomura, A., Izumi, M., Matsunaga, K., Inoue, K., Gamo, K., Satou, M., and Namba, S.: Mat. Res. Soc. Symp. Proc.
108, 51 (1988)Google Scholar