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3-Dimensional Al2O3 Fiber Networks using Low Temperature Atomic Layer Deposition on a Cotton Template

Published online by Cambridge University Press:  01 February 2011

Daisuke Hojo ,
G. Kevin Hyde ,
Joseph Spagnola  and
Gregory N Parsons
Daisuke Hojo
Affiliation:
[email protected], Tohoku Univ., Institute of Multidisciplinary Research for Advanced Materials,, Katahira 2-1-1, Aoba-ku, Sendai 980-8577, Sendai, N/A, Japan, 81-22-217-5630, 81-22-217-5631
G. Kevin Hyde
Affiliation:
[email protected], North Carolina State University, Department of Chemical and Biomolecular Engineering, 911 Partners Way, Centennial Campus, Raleigh, NC, 27695, United States
Joseph Spagnola
Affiliation:
[email protected], North Carolina State University, Department of Material Science and Engineering, 911 Partners Way, Centennial Campus, Raleigh, NC, 27695, United States
Gregory N Parsons
Affiliation:
[email protected], North Carolina State University, Department of Chemical and Biomolecular Engineering, 911 Partners Way, Centennial Campus, Raleigh, NC, 27695, United States
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Abstract

Micro-scale woven structures were replicated 3 dimensionally by conformal coating onto natural woven cotton using a binary reaction of trimethylaluminum and water at 100°C. Even after the woven cotton was removed at 450°C, the woven structures completely remained. Results demonstrate the capability of ALD to penetrate into the complex 3D network structure of natural woven cotton to form uniform coating at low temperature and give insight into general understanding of methodology to translate deposition processes from 2D surface to a 3D network to obtain a uniform coating throughout the sample network bulk. It also shows the possibility of replication of micro-scale structures from highly conformal coatings to give the unique synthesis root of hollow structures.

Keywords

atomic layer depositionthin filmnanostructure
Type
Research Article
Information
MRS Online Proceedings Library (OPL) , Volume 1054: Symposium FF – Synthesis and Surface Engineering of Three-Dimensional Nanostructures , 2007 , 1054-FF03-08
Copyright
Copyright © Materials Research Society 2008

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