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0.5 MeV Submicron Ion Probe System for RBS/PIXE.
Published online by Cambridge University Press: 25 February 2011
Abstract
A nuclear microprobe-forming system for the microscopic RBS/PIXE measurement of micro devices has been developed and installed at the Research Center for Extreme Materials, Osaka University. The use of precision quadrupole magnets and an objective collimator ensures a final spot size of less than 1μm.
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- Copyright © Materials Research Society 1989