Hostname: page-component-78c5997874-s2hrs Total loading time: 0 Render date: 2024-11-09T09:17:44.796Z Has data issue: false hasContentIssue false
  • English
  • Français

Ultrasonic Force Microscopy

Published online by Cambridge University Press:  29 November 2013

Kazushi Yamanaka
Get access

Extract

As an imaging method of elastic properties and subsurface features on the microscopic scale, the scanning acoustic microscope (SAM) provides spatial resolution comparable or superior to that of optical microscopes. Nondestructive evaluation methods of defects and elastic properties on the microscopic scale were developed by using the SAM, and they have been widely applied to various fields in science and technology. One major problem in acoustic microscopy is resolution. The best resolution of SAM with water as the coupling fluid has been 240 nm at a frequency of 4.4 GHz. At a more conventional frequency of 1 GHz, the resolution is about 1 μm. Therefore the resolution of SAM is not always sufficient for examining nanoscale defects and advanced micro/nanodevices.

For materials characterization on the nanometer scale, atomic force microscopy (AFM) was developed and extended in order to observe elastic properties in force-modulation mode. In the force-modulation mode, the sample is vibrated, and the resultant cantilever-deflection vibration is measured and used to produce elasticity images of objects. The lateral force-modulation AFM can evaluate the friction force or the shear elasticity in real time. However in the force-modulation mode, it is difficult to analyze stiff objects such as metals and ceramics.

When the sample is vertically vibrated at ultrasonic frequencies much higher than the cantilever resonance frequency, the tip cannot vibrate due to the inertia of the cantilever. However by modulating the amplitude of the ultrasonic vibration, deflection vibration of the cantilever at the modulation frequency is excited due to the rectifier effect of the nonlinear force curves. Based on the tip-sample indentation during ultrasonic vibration, we developed ultrasonic force microscopy (UFM) for contact elasticity and subsurface imaging of rigid objects using a soft cantilever with a stiffness of the order of 0.1 N/m.

Type
Ultrasonic Nondestructive Techniques for Materials Characterization
Information
MRS Bulletin , Volume 21 , Issue 10 , October 1996 , pp. 36 - 41
Copyright
Copyright © Materials Research Society 1996

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Binnig, G., Quate, C.F., and Gerber, Ch., Phys. Rev. Lett. 56 (1986) p. 930.CrossRefGoogle Scholar
2.Radmacher, M., Tillmann, R.W., and Gaub, H.E., Biophys. J. 64 (1993) p. 735.CrossRefGoogle Scholar
3.Maivald, P., Butt, H.J., Gould, S.A.C., Prater, C.B., Drake, B., Gurley, J.A., Elings, V.B., and Hansma, P.K., Nanotechnology 2 (1991) p. 103.CrossRefGoogle Scholar
4.Yamanaka, K., Kolosov, O., Ogiso, H., Sato, H., and Koda, T., Proc. Jpn. Acoust. Soc. Spring Meeting (1993) p. 889.Google Scholar
5.Tomita, E., Yamanaka, K., and Fujihira, M., Ext. Abstr. 41st Spring Meeting Jpn. Soc. Appl. Phys. Related Soc. 30a-MC-8 (Tokyo, 1994) p. 446.Google Scholar
6.Yamanaka, K. and Tomita, E.; Jpn. J. Appl. Phys. 34 (1995) p. 2879.CrossRefGoogle Scholar
7.Rohrbeck, W. and Chilla, E., Phys. Status Solidi A 131 (1992) p. 69.CrossRefGoogle Scholar
8.Kolosov, O. and Yamanaka, K., Jpn. J. Appl. Phys. 32 (1993) p. L1095.CrossRefGoogle Scholar
9.Yamanaka, K., Ogiso, H., and Kolosov, O., Appl. Phys. Lett. 64 (1994) p. 178.CrossRefGoogle Scholar
10.Yamanaka, K., Ogiso, H., and Kolosov, O., Jpn. J. Appl. Phys. 33 (1994) p. 3197.CrossRefGoogle Scholar
11.Yamanaka, K., Thin Solid Films 273 (1996) p. 116.CrossRefGoogle Scholar
12.Tetelman, A.S. and McEvily, A.J. Jr., Fracture of Structural Materials (John Wiley & Sons, New York, 1967).Google Scholar
13.Yamanaka, K. and Nakano, S., Proceeding of the Third International Colloquium on Scanning Tunneling Microscopy, Kanazawa, December 7–9 (1995) p. 59.Google Scholar
14.Yamanaka, K. and Nakano, S., Jpn. J. Appl. Phys. 35 (1996) p. 3787.CrossRefGoogle Scholar
15.Rabe, U. and Arnold, W., Ann. Phys. 3 (1994) p. 589.CrossRefGoogle Scholar
16.Yamanaka, K., Ext. Abstr. 55th Autumn Meeting Jpn. Soc. Appl. Phys. (1994) p. 456.Google Scholar
17.Nelder, J.A. and Mead, R., Comput. J. 7 (1965) p. 308.CrossRefGoogle Scholar
18.Maugis, D., J. Colloid Interface Sci. 150 (1992) p. 243.CrossRefGoogle Scholar