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Tungsten Electrodes Reduce Parasitic Source/Drain Resistance of Poly-Si TFT
Published online by Cambridge University Press: 31 January 2011
Abstract
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- Information
- MRS Bulletin , Volume 29 , Issue 3: High-Resolution Three-Dimensional X-Ray Microscopy , March 2004 , pp. 138 - 140
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- Copyright © Materials Research Society 2004