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Sputter-Deposited Shape-Memory Alloy Thin Films: Properties and Applications

Published online by Cambridge University Press:  31 January 2011

Akira Ishida  and
Valery Martynov
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Abstract

Shape-memory alloy (SMA) thin films formed by sputter deposition have attracted considerable attention in the last decade. Current intensive research demonstrates that unique fine microstructures are responsible for the superior shape-memory characteristics observed in thin films as compared with bulk materials. Simultaneously, much effort has been undertaken to develop and fabricate micro devices actuated by SMA thin films. This article reviews the research to date on shape-memory behavior and the mechanical properties of SMA thin films in connection with their peculiar microstructures. Promising applications such as microvalves are demonstrated, along with a focused discussion on process-related problems. All of the results indicate that thin-film shape-memory actuators are ready to contribute to the development of microelectromechanical systems.

Keywords

intermetallic alloysphase transformationMEMSshape memorythin films.
Type
Research Article
Information
MRS Bulletin , Volume 27 , Issue 2: Science and Technology of Shape-Memory Alloys: New Developments , February 2002 , pp. 111 - 114
Copyright
Copyright © Materials Research Society 2002

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