Plasma Processing for VLSI Edited by: N. G. Einspruch and D. M. Brown (Volume 8 of VLSI Electronics Microstructure Science, edited by N. G. Einspruch, 1984, Academic Press)

Stephen M. Bobbio

doi:10.1557/S0883769400069657

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Plasma Processing for VLSI Edited by: N. G. Einspruch and D. M. Brown (Volume 8 of VLSI Electronics Microstructure Science, edited by N. G. Einspruch, 1984, Academic Press)

Published online by Cambridge University Press: 29 November 2013

Stephen M. Bobbio

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Type: Departments
Information: MRS Bulletin , Volume 11 , Issue 1 , February 1986 , pp. 2

DOI: https://doi.org/10.1557/S0883769400069657 [Opens in a new window]
Copyright: Copyright © Materials Research Society 1986

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Plasma Processing for VLSI Edited by: N. G. Einspruch and D. M. Brown (Volume 8 of VLSI Electronics Microstructure Science, edited by N. G. Einspruch, 1984, Academic Press)

Volume 11, Issue 1
Stephen M. Bobbio
DOI: https://doi.org/10.1557/S0883769400069657

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Article contents

Plasma Processing for VLSI Edited by: N. G. Einspruch and D. M. Brown (Volume 8 of VLSI Electronics Microstructure Science, edited by N. G. Einspruch, 1984, Academic Press)

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