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Nanoimprint Lithography and Lithographically Induced Self-Assembly

Published online by Cambridge University Press:  31 January 2011

Stephen Y. Chou
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Our ability to pattern nanostructures offers a unique path to discovery and innovation in science and technology. When nanostructures are smaller than a fundamental physical length scale, conventional theory may no longer apply, and new phenomena emerge.

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 7: Emerging Methods for Micro- and Nano-Fabrication Nanofabrication , July 2001 , pp. 512 - 517
Copyright
Copyright © Materials Research Society 2001

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References

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