Crossref Citations
This article has been cited by the following publications. This list is generated based on data provided by
Crossref.
Hacker, Nigel P.
Davis, Gary
Figge, Lisa
Krajewski, Todd
Lefferts, Scott
Nedbal, Jan
and
Spear, Richard
1997.
Properties of New Low Dielectric Constant Spin-on Silicon Oxide based Polymers.
MRS Proceedings,
Vol. 476,
Issue. ,
Murarka, S. P.
1998.
Chemical-Mechanical Planarization of the Polymer Interlayer Dielectrics.
MRS Proceedings,
Vol. 511,
Issue. ,
Muralidharan, G.
Narayanan, B.
Wong, C. C.
and
Manoharan, M.
1998.
On The Influence Of Titanium Alloy Composition And Layer Thickness On The Mechanical Properties Of A Polyimide Substrate.
MRS Proceedings,
Vol. 515,
Issue. ,
Senkevich, Jay J.
Simkovic, Viktor
and
Desu, Seshu B.
1998.
Optical Birefringence to Determine Morphological Changes in Low-K Thin Film CVD Polymers.
MRS Proceedings,
Vol. 511,
Issue. ,
Hu, C-K.
1998.
Reliability and Copper Interconnections with Low Dielectric Constant Materials.
MRS Proceedings,
Vol. 511,
Issue. ,
Senkevich, Jay J.
and
Desu, Seshu B.
1999.
Near-Room-Temperature Thermal Chemical Vapor Deposition of Poly(chloro-p-xylylene)/SiO2 Nanocomposites.
Chemistry of Materials,
Vol. 11,
Issue. 7,
p.
1814.
Haskel, D.
Sarikaya, M.
Qian, M.
and
Stern, E.A.
1999.
Towards nanoscale EXELFS analysis: limitation due to radiation damage.
Micron,
Vol. 30,
Issue. 2,
p.
185.
Lubguban, J.
Kurata, Y.
Inokuma, T.
and
Hasegawa, S.
1999.
Deposition of SiO2:F:C Films With Low Dielectric Constant and With High Resistance to Annealing.
MRS Proceedings,
Vol. 606,
Issue. ,
Kim, H.K.
Shi, F.G.
Zhao, B.
and
Brongo, M.
2000.
Low-k dielectrics for ULSI multilevel interconnections: thickness-dependent electrical and dielectric properties.
p.
62.
Grill, A.
2001.
Encyclopedia of Materials: Science and Technology.
p.
2143.
Kim, H.K.
and
Shi, F.G.
2001.
Thickness dependent dielectric strength of a low-permittivity dielectric film.
IEEE Transactions on Dielectrics and Electrical Insulation,
Vol. 8,
Issue. 2,
p.
248.
Weldon, Marcus K
Queeney, K.T
Eng Jr, Joseph
Raghavachari, Krishnan
and
Chabal, Yves J
2002.
The surface science of semiconductor processing: gate oxides in the ever-shrinking transistor.
Surface Science,
Vol. 500,
Issue. 1-3,
p.
859.
Huang, Q. R.
Volksen, Willi
Huang, Elbert
Toney, M.
Frank, Curtis W.
and
Miller, Robert D.
2002.
Structure and Interaction of Organic/Inorganic Hybrid Nanocomposites for Microelectronic Applications. 1. MSSQ/P(MMA-co-DMAEMA) Nanocomposites.
Chemistry of Materials,
Vol. 14,
Issue. 9,
p.
3676.
Waeterloos, Joost J.
2003.
Low Dielectric Constant Materials for IC Applications.
Vol. 9,
Issue. ,
p.
277.
Ryan, E. T.
McKerrow, A. J.
Leu, J.
and
Ho, P. S.
2003.
Low Dielectric Constant Materials for IC Applications.
Vol. 9,
Issue. ,
p.
23.
Long, Timothy M.
and
Swager, Timothy M.
2003.
Molecular Design of Free Volume as a Route to Low-κ Dielectric Materials.
Journal of the American Chemical Society,
Vol. 125,
Issue. 46,
p.
14113.
Yang, Ching‐Yu
Hsu, Steve Lien‐Chung
and
Chen, J. S.
2005.
Synthesis and properties of 6FDA‐BisAAF‐PPD copolyimides for microelectronic applications.
Journal of Applied Polymer Science,
Vol. 98,
Issue. 5,
p.
2064.
Su, Kai
Bujalski, Duane R.
Eguchi, Katsuya
Gordon, Glenn V.
Ou, Duan-Li
Chevalier, Pierre
Hu, Sanlin
and
Boisvert, Ronald P.
2005.
Low-k Interlayer Dielectric Materials: Synthesis and Properties of Alkoxy-Functional Silsesquioxanes.
Chemistry of Materials,
Vol. 17,
Issue. 10,
p.
2520.
Wang, Zen‐You
Ho, Jiau‐Ching
and
Shu, Wei‐Jye
2012.
Studies of fluorine‐containing bismaleimide resins part I: Synthesis and characteristics of model compounds.
Journal of Applied Polymer Science,
Vol. 123,
Issue. 5,
p.
2977.
Fukumaru, Takahiro
Fujigaya, Tsuyohiko
and
Nakashima, Naotoshi
2012.
Extremely High Thermal Resistive Poly(p-phenylene benzobisoxazole) with Desired Shape and Form from a Newly Synthesized Soluble Precursor.
Macromolecules,
Vol. 45,
Issue. 10,
p.
4247.