Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators, Ian W. Boyd (Springer-Verlag, 1987)

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Type: Departments
Information: MRS Bulletin , Volume 14 , Issue 3 , March 1989 , pp. 64 - 65

DOI: https://doi.org/10.1017/S0883769400063296 [Opens in a new window]

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Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators, Ian W. Boyd (Springer-Verlag, 1987)

Volume 14, Issue 3
Irving P. Herman
DOI: https://doi.org/10.1017/S0883769400063296

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Laser Processing of Thin Films and Microstructures: Oxidation, Deposition and Etching of Insulators, Ian W. Boyd (Springer-Verlag, 1987)

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