Laser Microfabrication: Thin Film Processes and Lithography, Edited by Daniel J. Ehrlich and Jeffrey Y. Tsao, (Academie Press, 1989), 587 pages ISBN: 0-12-233430-2

Irving P. Herman

doi:10.1017/S0883769400059789

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Laser Microfabrication: Thin Film Processes and Lithography, Edited by Daniel J. Ehrlich and Jeffrey Y. Tsao, (Academie Press, 1989), 587 pages ISBN: 0-12-233430-2

Published online by Cambridge University Press: 29 November 2013

Irving P. Herman

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Type: Departments
Information: MRS Bulletin , Volume 15 , Issue 5 , May 1990 , pp. 57 - 58

DOI: https://doi.org/10.1017/S0883769400059789 [Opens in a new window]
Copyright: Copyright © Materials Research Society 1990

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Laser Microfabrication: Thin Film Processes and Lithography, Edited by Daniel J. Ehrlich and Jeffrey Y. Tsao, (Academie Press, 1989), 587 pages ISBN: 0-12-233430-2

Volume 15, Issue 5
Irving P. Herman
DOI: https://doi.org/10.1017/S0883769400059789

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Article contents

Laser Microfabrication: Thin Film Processes and Lithography, Edited by Daniel J. Ehrlich and Jeffrey Y. Tsao, (Academie Press, 1989), 587 pages ISBN: 0-12-233430-2

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