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Laser Microfabrication: Thin Film Processes and Lithography, Edited by Daniel J. Ehrlich and Jeffrey Y. Tsao, (Academie Press, 1989), 587 pages ISBN: 0-12-233430-2
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Laser Microfabrication: Thin Film Processes and Lithography, Edited by Daniel J. Ehrlich and Jeffrey Y. Tsao, (Academie Press, 1989), 587 pages ISBN: 0-12-233430-2
Published online by Cambridge University Press: 29 November 2013
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