Hostname: page-component-586b7cd67f-2brh9 Total loading time: 0 Render date: 2024-11-26T17:47:16.159Z Has data issue: false hasContentIssue false
  • English
  • Français

Large-Scale Manufacturing of Nanoscale Multilayered Hard Coatings Deposited by Cathodic Arc/Unbalanced Magnetron Sputtering

Published online by Cambridge University Press:  31 January 2011

W.-D. Münz
Get access

Abstract

Nanoscale multilayered (superlattice) hard coatings can be manufactured in a plastic hardness range (HP) between 25GPa and 55 GPa by a combination of cathodic arc evaporation and unbalanced magnetron sputtering (arc bond sputter technology). Using large-scale industrial physical vapor deposition (PVD) equipment and a sufficiently high pumping speed, multilayered coatings can be deposited by simultaneously operating cathodes without special shutter and shielding facilities in a common reactive-gas atmosphere. The efficiency of the process is in many cases identical to that of TiN and CrN. Temperature-resistant, wear-resistant, and corrosion-resistant coatings of various compositions have been produced under industrial conditions. So far, the main applications concentrate on metal-forming and on cutting die steel, Inconel, stainless steel, and titanium. Applications have also been found in the chemical, textile, medical, and automotive industries.

Keywords

anticorrosion propertiescathodic arc/unbalanced magnetron (CA/UBM) sputteringfriction reductionnanoscale multilayersphysical vapor deposition (PVD)superhard coating materialssuperlatticeswear resistance
Type
Research Article
Information
MRS Bulletin , Volume 28 , Issue 3: Superhard Coating Materials , March 2003 , pp. 173 - 179
Copyright
Copyright © Materials Research Society 2003

Access options

Get access to the full version of this content by using one of the access options below. (Log in options will check for institutional or personal access. Content may require purchase if you do not have access.)

References

1.Helmersson, U., Todorova, S., Barnett, S.A., Sundgren, J.-E., Markert, L.C., and Greene, J.E., J. Appl. Phys. 62 (1987) p. 481.Google Scholar
2.Chu, X., Wong, M.S., Sproul, W.D., Rohde, S.L., and Barnett, S.A., J. Vac. Sci. Technol., A 10 (1992) p. 1604.CrossRefGoogle Scholar
3.Yashar, P., Barnett, S.A., Rechner, J., and Sproul, W.D., J. Vac. Sci. Technol., A 16 (5) (1998) p. 2913.CrossRefGoogle Scholar
4.Yashar, P.C. and Sproul, W.D., Vacuum 55 (1999) p. 179.Google Scholar
5.Donohue, L.A., Münz, W.-D., Lewis, D.B., Cawley, J., Hurkmans, T., Trinh, T., Petrov, I., and Greene, J.E., Surf. Coat. Technol. 93 (1997) p. 69.CrossRefGoogle Scholar
6.Münz, W.-D., Lewis, D.B., Hovsepian, P.Eh., Schönjahn, C., Ehiasarian, A.P., and Smith, I.J., Surf. Eng. 17 (1) (2001) p. 15.Google Scholar
7.Setoyama, M., Nakayama, A., Tanaka, M., Kitagawa, N., and Nomura, T., Surf. Coat. Technol. 86/87 (1996) p. 225.Google Scholar
8.Münz, W.-D., Schulze, D., and Hauzer, F.J.M., Surf. Coat. Technol. 50 (1992) p. 169.Google Scholar
9.Donohue, L.A., Smith, I.J., Münz, W.-D., Petrov, I., and Greene, J.E., Surf. Coat. Technol. 94/95 (1997) p. 226.Google Scholar
10.Lembke, M.I., Lewis, D.B., Münz, W.-D., and Titchmarsh, J.M., Surf. Eng. 17 (2) (2001) p. 153.Google Scholar
11.Yang, S. and Teer, D.G., Surf. Coat. Technol. 131 (2000) p. 412.Google Scholar
12.Schönjahn, C., Lewis, D.B., Münz, W.-D., and Petrov, I., Surf. Eng. 16 (2) (2000) p. 176.Google Scholar
13.Schönjahn, C., Paritong, H., Münz, W.-D., Twesten, R.D., and Petrov, I., J. Vac. Sci. Technol., A 19 (4) (2001) p. 1392.Google Scholar
14.B.V., Fokker (unpublished).Google Scholar
15.Leyens, C., Peters, M., Hovsepian, P.Eh., Lewis, D.B., Luo, Q., and Münz, W.-D., Surf. Coat. Technol. 155 (2002) p. 103.Google Scholar
16.Aspinwall, D.K., Dewes, R.C., Ng, E.-G., Sage, C., and Soo, S.L., in Proc. 5th Int. Conf. on Behavior of Materials in Machining (2000) p. 45.Google Scholar
17.Nayal, G., Lewis, D.B., Lembke, M., Münz, W.-D., and Cockrem, J.E., Surf. Coat. Technol. 111 (1999) p. 148.Google Scholar
19.Ehiasarian, A.P., Münz, W.-D., Hultman, L., Helmersson, U., and Petrov, I., Surf. Coat. Technol. 163–164 (2003) p. 267.Google Scholar