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High-Aspect-Ratio Structures for MEMS

Published online by Cambridge University Press:  31 January 2011

Stella W. Pang
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Extract

Many microelectromechanical systems (MEMS) use the changing capacitance of movable parallel plates to drive and sense motion. An increase in this capacitance improves the performance of these micromechanical structures by means of increased electromechanical coupling for lower driving voltages and increased sensitivity of the micromechanical motion.

Type
Research Article
Information
MRS Bulletin , Volume 26 , Issue 4: Microelectromechanical Systems (MEMS): Technology and Applications , April 2001 , pp. 307 - 308
Copyright
Copyright © Materials Research Society 2001

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